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Triple-frequency floating probe method for plasma parameters applicable to processing plasmasGo to Link

Seo, Beom-Jun; Lee, Ho-Won; Jeon, Sang-Bum; Nahm, Hyeon-Ho; Chung, Chin-Wook

ArticleIssue Date2025CitationPlasma Sources Science and Technology, v.34, no.5, pp 1 - 10PublisherInstitute of Physics Publishing
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