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A novel solution for next-generation EUV pellicle: Breathable membrane with increased transmittanceGo to Link

Kim, Haneul; Kim, Jungyeon; Kang, Young-Woo; Kim, Min-Woo; Ha, Tae Joong; Lee, Gi Sung; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2024CitationOPTICAL AND EUV NANOLITHOGRAPHY XXXVII, v.12953, pp 1 - 5PublisherSPIE-INT SOC OPTICAL ENGINEERING
SCIESCOPUS
Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical BehaviorGo to Linkopen access

Kim, Haneul; Kim, Jungyeon; Kang, Young Woo; Lee, Taeho; Kim, Min-Woo; Ha, Tae Joong; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2025CitationMATERIALS, v.19, no.1, pp 1 - 14PublisherMDPI
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