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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Discharge dynamics and plasma density recovery by on/off switches of additional gasGo to Link

Lee, Hyo-Chang; Kwon, Deuk-Chul; Oh, SeungJu; Kang, Hyun-Ju; Kim, Yu-Sin; Chung, Chin-Wook

ArticleIssue Date2016CitationPhysics of Plasmas, v.23, no.6, pp 1 - 5PublisherAmerican Institute of Physics
SCISCIESCOPUS
Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency biasGo to Link

Lee, Hyo-Chang; Oh, SeungJu; Chung, Chin-Wook

ArticleIssue Date2012CitationPlasma Sources Science and Technology, v.21, no.3, pp 1 - 6PublisherInstitute of Physics Publishing
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