Choi, Su-Hwan; Jeong, Hyun-Jun; Hong, TaeHyun; Na, Yong Hwan; Park, Chi Kwon; Lim, Myung Yong; Jeong, Seong Hoon; Lim, Jun Hyung; Park, Jin-Seong
ArticleIssue Date2021CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.39, no.3, pp.1 - 7PublisherA V S AMER INST PHYSICS