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Research of non-uniformity in 450 mm multi-electrode capacitive coupled plasmaGo to Link

Park, Gi Jung; Lee, Yoon Seong; Seo, Sang Hoon; Chung, Chin Wook; Chang, Hong Young

ArticleIssue Date2013CitationThin Solid Films, v.547, pp 293 - 298PublisherElsevier Sequoia
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