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Atomic force microscopy study of the role of molecular weight of poly(acrylic acid) in chemical mechanical planarization for shallow trench isolationGo to Link

Cho, Chae-Woong; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun; Sigmund, Wolfgang M

ArticleIssue Date2006CitationJournal of Materials Research, v.21, no.2, pp 473 - 479PublisherMaterials Research Society
SCIESCOPUSKCI
Effect of the hydroxyl-ethyl-cellulose concentration in a silicon wafer polishing slurry on the wafer surface roughness

Cho, Kyu-Chul; Jeon, Hyeongtag; Park, Jea-Gun

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.48, no.4, pp L507 - L509Publisher한국물리학회
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