Yang, Hae Lin; Kim, Tae-Yeon; Park, Gi-Beom; Yoon, Ara; Song, Ki-cheol; Lee, Yeonhee; Park, Jongryul; Kang, Taehyeong; Park, Yongjoo; Park, Jin-Seong
ArticleIssue Date2023CitationMaterials Science in Semiconductor Processing, v.164, pp.1 - 8PublisherElsevier Ltd