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Browsing by Park, Myoung-SungAuthor

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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Dry etching of TaN/HfO2 gate-stack structure in BCl3/Ar/O-2 inductively coupled plasmasGo to Link

Shin, Myung Hun; Park, Myoung-Sung; Lee, Nae-Eung; Kim, Jiyoung; Kim, Chung Ywong; Ahn, Jinho

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology A, v.24, no.4, pp 1373 - 1379PublisherAmerican Institute of Physics
SCIESCOPUS
Effects of additive C4F8 during inductively coupled BCl3/C4F8/Ar plasma etching of TaN and HfO2 for gate stack patterningGo to Link

Ko, Jae-Hyeon; Kim, D. Y.; Park, Myoung-Sung; Lee, Nae Eung; Lee, SS; Ahn, Jinho; Mok, Hyungsoo

ArticleIssue Date2007CitationJournal of Vacuum Science and Technology A, v.25, no.4, pp 990 - 995PublisherAmerican Institute of Physics
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