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Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasmaGo to Link

Lim, Yeong-Min; Park, So-Yeong; 하우; Hong, Young-Hun; Chung, Chin Wook

ArticleIssue Date2022CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.40, no.6, pp 1 - 10PublisherA V S AMER INST PHYSICS
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