ScholarWorks@Hanyang University

Browsing by Park, Young WookAuthor

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 4 of 4

SCIESCOPUS
Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi2 Membranes for Extreme Ultraviolet PelliclesGo to Linkopen access

Kim, Won Jin; Wi, Seong Ju; Moon, Seungchan; Hong, Junho; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2026CitationCRYSTALS, v.16, no.2, pp 1 - 10PublisherMDPI
SCIESCOPUS
Enhanced resistance property between ALD-Ru and W by controlling oxygen behavior with post Ru deposition annealingGo to Link

Kim, Sung Jun; Kim, Seon Yong; Park, Jun Hyeong; Park, In-Sung; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2025CitationMaterials Science in Semiconductor Processing, v.185, pp 1 - 8PublisherPergamon Press
SCOPUS
Impact of nano-scale grain size on the properties of ZrSi2 EUV pelliclesGo to Link

Kim, Won Jin; Kim, Haneul; Kang, Young Woo; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2025CitationProceedings of SPIE - The International Society for Optical Engineering, v.13424, pp 1 - 4PublisherSPIE
SCOPUS
Multilayered EUV Pellicle: Enhanced Mechanical Strength and Thermal Stability

Kang, Young Woo; Kim, Ha Neul; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13215, pp 1 - 5PublisherSPIE
1
CONTACT US

RSS_1.0 RSS_2.0 ATOM_1.0

222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1366

COPYRIGHT © 2024 HANYANG UNIVERSITY.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

BROWSE

한국어