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c-Axis Aligned 3 nm Thick In2O3 Crystal Using New Liquid DBADMIn Precursor for Highly Scaled FET Beyond the Mobility-Stability Trade-off

Choi, Su-Hwan; Ryu, Seong-Hwan; Kim, Dong-Gyu; Kwag, Jae-Hyeok; Yeon, Changbong; Jung, Jaesun; Park, Young-Soo; Park, Jin-Seong

ArticleIssue Date2024CitationNano Letters, v.24, no.4, pp 1324 - 1331PublisherAmerican Chemical Society
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