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A method for measuring individual ion density in an Ar/He mixture inductively coupled plasmaGo to Link

Son, Jin-Ung; Lee, Moo-Hyun; Kim, Min-Seok; Jung, Jiwon; Seo, Beom-Jun; Kim, Ju-Ho; Chung, Chin-Wook

ArticleIssue Date2025CitationPlasma Sources Science and Technology, v.34, no.3, pp 1 - 10PublisherInstitute of Physics Publishing
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