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High Mobility and GIDL Erase-Compatible Characteristics in Hybrid Channel (Poly-Si/IGO) for Ultrahigh 3D NAND Flash Memory ApplicationsGo to Link

Sim, Jae-Min; Choi, Su-Hwan; Ryu, Seong-Hwan; Song, Ji-Ho; Park, Jin-Seong; Song, Yun-Heub

ArticleIssue Date2024CitationACS Applied Electronic Materials, v.6, no.2, pp 1087 - 1093PublisherAMER CHEMICAL SOC
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