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Bi-axial fracture strength characteristic of an ultra-thin flash memory chip

Jeon, Eun-Beom; Park, Jae-Dong; Song, Jung Han; Lee, Hye Jin; Kim, Hak-Sung

ArticleIssue Date2012CitationJournal of Micromechanics and Microengineering, v.22, no.10, pp 1 - 11PublisherInstitute of Physics Publishing
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