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Browsing by Song, Ki-CheolAuthor

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SCIESCOPUS
Impact of hydrogen-controlled thermal ALD SiO2 insulators on IGZO channel FETs to optimize the electrical performanceGo to Linkopen access

Choi, Su-Hwan; Kim, Dong-Gyu; Kwag, Jae-Hyeok; Song, Ki-Cheol; Lee, Yeonhee; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2025CitationJournal of Materials Chemistry C, v.13, no.12, pp 6215 - 6223PublisherRoyal Society of Chemistry
SCIESCOPUS
Nitrogen Doping Strategy in SiO2 Insulators for Stable and Hydrogen-Resistant ALD-IGZO TFTsGo to Link

Kim, Tae Heon; Kim, Dong-Gyu; Kim, Sang-Hyun; Kim, Tae-Kyung; Song, Ki-Cheol; Lee, Yeonhee; Park, Jin-Seong

ArticleIssue Date2025CitationACS Applied Materials & Interfaces, v.17, no.13, pp 19928 - 19937PublisherAmerican Chemical Society
SCOPUSESCI
Nitrogen-enabled amorphous stabilization of high-mobility in-rich IGO via PEALD for uniform and reliable oxide TFTsGo to Linkopen access

Yang, YuJin; Kim, Sang-Hyun; Kim, Tae Heon; Song, Jeong-Su; Lee, Sun Myung; Song, Ki-Cheol; Lee, Yeonhee; Kim, Yoon-Seo; Park, Jin-Seong

ArticleIssue Date2026CitationMATERIALS TODAY ELECTRONICS, v.16, pp 1 - 11PublisherELSEVIER
SCIESCOPUS
Precursor ligand chemistry-driven engineering of SiNx gate insulators for enhanced IGZO TFTsGo to Link

Kim, Tae Heon; Kim, Sang-Hyun; Yang, YuJin; Kim, Ji Min; Kim, Tae-Kyung; Song, Ki-Cheol; Lee, Yeonhee; Park, Jin-Seong

ArticleIssue Date2026CitationApplied Surface Science, v.719, pp 1 - 10PublisherElsevier BV
SCIESCOPUS
Precursor-driven nucleation and texture control governing resistivity in low-temperature In2O3 filmsGo to Link

Kim, Tae-Kyung; Gwoen, Ji-Hyun; Han, Ju-Hwan; Kim, Hae-Dam; Kim, Ji Min; Kim, Tae-Heon; Kim, Sang-Hyun; Song, Ki-Cheol; Park, Jin-Seong

ArticleIssue Date2025CitationJOURNAL OF ALLOYS AND COMPOUNDS, v.1044, pp 1 - 9PublisherELSEVIER SCIENCE SA
SCIESCOPUS
Reduction of trap density in high-k dielectrics through optimized ALD process and high-pressure deuterium annealing

Hwang, Taewon; Choi, Su-Hwan; Song, Ki-Cheol; Lee, Yeonhee; Kwag, Jae-Hyeok; Lee, Jun-Yeoub; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2025CitationMaterials Science in Semiconductor Processing, v.191, pp 1 - 8PublisherPergamon Press
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