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SCIESCOPUS
Characteristics of High-Crystallinity ZrO2 Thin Films Deposited Using Remote Plasma Atomic Layer DepositionGo to Link

Song, Seokhwi; Jung, Chanwon; Kim, Jisoo; Kim, Younsoo; Lim, Hanjin; Jeon, Hyeongtag

ArticleIssue Date2023CitationPHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, v.220, no.1, pp 1 - 5PublisherWILEY-V C H VERLAG GMBH
SCIESCOPUS
Characteristics of Silicon Oxide Thin Film Deposited via Remote Plasma Atomic Layer DepositionGo to Link

Jung, Chanwon; Song, Seokhwi; Lee, Namgue; Kim, Youngjoon; Lee, Eun Jong; Lee, Sung Gwon; Jeon, Hyeongtag

ArticleIssue Date2021CitationECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.10, no.4, pp.1 - 54PublisherELECTROCHEMICAL SOC INC
SCOPUS
Crystallinity-Controlled Atomic Layer Deposition of Ti-Doped ZrO2 Thin Filmsopen access

Song, Seokhwi; Kim, Eungju; Kim, Kyunghoo; Bae, Jangho; Lee, Jinho; Jung, Chang Hwa; Lim, Hanjin; Jeon, Hyeongtag

ArticleIssue Date2024CitationECS Advances, v.3, no.1, pp 1 - 5PublisherIOP Publishing
SCIESCOPUS
Development of a SnS Film Process for Energy Device ApplicationsGo to Linkopen access

Choi, Hyeongsu; Lee, Namgue; Park, Hyunwoo; Choi, Yeonsik; Kim, Keunsik; Choi, Yeongtae; Kim, Jongwoo; Song, Seokhwi; Yuk, Hyunwoo; Jeon, Hyeongtag

ArticleIssue Date2019CitationAPPLIED SCIENCES-BASEL, v.9, no.21, pp.1 - 12PublisherMDPI
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