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SCIESCOPUS
Effect of aluminum content on plasma resistance and contamination particle generation in yttrium aluminum oxide coatingsGo to Link

So, Jongho; Choi, Eunmi; Kim, Minjoong; Lee, Dongjin; Seo, Jungpil; Maeng, Seonjeong; Chung, Chin-Wook; Yun, Ju-Young; Suh, Song-Moon

ArticleIssue Date2024CitationMaterials Science in Semiconductor Processing, v.170, pp 1 - 7PublisherPergamon Press
SCIESCOPUS
Effect of controlling residual moisture in atmospheric plasma spray-Y2O3 coatings on random defect generation by halogen-based plasmaGo to Linkopen access

So, Jongho; Choi, Eunmi; Kim, Minjoong; Lee, Dongjin; Seo, Jungpil; Maeng, Seonjeong; Chung, Chin-Wook; Yun, Ju-Young; Suh, Song-Moon

ArticleIssue Date2025CitationJOURNAL OF THE EUROPEAN CERAMIC SOCIETY, v.45, no.2, pp 1 - 7PublisherELSEVIER SCI LTD
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