Toan, Nguyen Van; Zhao, Dong; Inomata, Naoki; Toda, Masaya; Song, Yun Heub; Ono, Takahito
ArticleIssue Date2019Citation2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp.1709 - 1711PublisherInstitute of Electrical and Electronics Engineers Inc.