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SCIESCOPUS
Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order ModeGo to Linkopen access

Toan, Nguyen Van; Shimazaki, Tsuyoshi; Inomata, Naoki; Song, Yunheub; Ono, Takahito

ArticleIssue Date2017CitationMicromachines, v.8, no.10PublisherMultidisciplinary Digital Publishing Institute (MDPI)
SCIESCOPUS
Impact of etch angles on cell characteristics in 3D NAND flash memoryGo to Link

Oh, Young-Taek; Kim, Kyu-Beom; Shin, Sang-Hoon; Sim, Hahng; Toan, Nguyen Van; Ono, Takahito; Song, Yun Heub

ArticleIssue Date2018CitationMicroelectronics Journal, v.79, pp 1 - 6PublisherElsevier BV
SCOPUS
Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor DepositionGo to Link

Toan, Nguyen Van; Zhao, Dong; Inomata, Naoki; Toda, Masaya; Song, Yun Heub; Ono, Takahito

ArticleIssue Date2019CitationInternational Solid-State Sensors, Actuators and Microsystems Conference, pp 1709 - 1711PublisherIEEE
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