Shim, Hang; Sakamoto, Kei; Inomata, Naoki; Toda, Masaya; Toan,Nguyen Van; Song, Yun Heub; Ono, Takahito
ArticleIssue Date2019Citation2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp.1698 - 1700PublisherInstitute of Electrical and Electronics Engineers Inc.