Detailed Information
Cited 0 time in 
Cited 1 time in 
Cited 1 time in
Metadata Downloads
Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator
- Authors
- Shim, Hang; Sakamoto, Kei; Inomata, Naoki; Toda, Masaya; Toan,Nguyen Van; Song, Yun Heub; Ono, Takahito
- Issue Date
- Jun-2019
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Keywords
- Electrodeposition; TbxDy(1-x)Fey; Terfenol-D
- Citation
- 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp.1698 - 1700
- Indexed
- SCOPUS
- Journal Title
- 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
- Start Page
- 1698
- End Page
- 1700
- ISSN
- 2167-0013
- Abstract
- This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film TbxDy(1-x)Fe-y for magnetic actuation, and the magnetostrictive actuation performances are evaluated. The film is deposited by electrodeposition using a three-electrodes system. Bi-material cantilever structures are fabricated and the magnetic actuation performances are evaluated. The actuators show high magnetostriction coefficients of approximately 1200 ppm at magnetic field 9000 Oe.
- Files in This Item
- Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 융합전자공학부 > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Song, Yun Heub
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)