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Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi2 Membranes for Extreme Ultraviolet PelliclesGo to Linkopen access

Kim, Won Jin; Wi, Seong Ju; Moon, Seungchan; Hong, Junho; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2026CitationCRYSTALS, v.16, no.2, pp 1 - 10PublisherMDPI
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