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Facile routes to enhance doping efficiency using nanocomposite structures for high-mobility and stable PEALD-ITGO TFTsGo to Link

Kim, Dong-Gyu; Kim, Minseok; Lee, Dong-Hyeon; Lee, Seunghee; Kho, Jihyun; Kim, Yurim; Kuh, Bongjin; Yanagi, Hiroshi; Fukui, Keiga; Park, Jin-Seong

ArticleIssue Date2024CitationApplied Surface Science, v.665, pp 1 - 10PublisherElsevier BV
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