Yang, Sin-Ju; Cha, Han-sun; Kang, Ju-Hyun; Yang, Chul-Kyu; Ahn, Jin ho; Nam, Kee-Soo
ArticleIssue Date2007CitationProceedings of SPIE - The International Society for Optical Engineering, v.6730Publisheravior of substrate dependency as surface treatment in the positive chemically amplified resist", Proc.