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Impact of atomic layer deposition supercycle design on the reliability of heterogenous IGZO channel TFTsGo to Link

Oh, Hye-Jin; Kim, Hye-Mi; Yoo, Hyeong Suk; Kim, Ji Wan; Baek, Il Jin; Park, Jin-Seong

ArticleIssue Date2025CitationCeramics International, v.51, no.2, pp 1793 - 1800PublisherElsevier
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