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A Study on the Growth Behavior and Stability of Molecular Layer Deposited Alucone Films Using Diethylene Glycol and Trimethyl Aluminum Precursors, and the Enhancement of Diffusion Barrier Properties by Atomic Layer Deposited Al₂O₃CappingGo to Link

Choi, Dong-won; Yoo, Mi; Lee, Hyuck Mo; Park, Jozeph; Kim, Hyun You; Park, Jin-Seong

ArticleIssue Date2016CitationACS Applied Materials & Interfaces, v.8, no.19, pp 12263 - 12271PublisherAmerican Chemical Society
SCIESCOPUS
Selective SnOx Atomic Layer Deposition Driven by Oxygen ReactantsGo to Link

Lee, Jung-Hoon; Yoo, Mi; Kang, DongHee; Lee, Hyun-Mo; Choi, Wan-ho; Park, Jung Woo; Yi, Yeonjin; Kim, Hyun You; Park, Jin-Seong

ArticleIssue Date2018CitationACS APPLIED MATERIALS & INTERFACES, v.10, no.39, pp.33335 - 33342PublisherAMER CHEMICAL SOC
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