Chang, Chienliu; Firouzi, Kamyar; Park, Kwan Kyu; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T.
ArticleIssue Date2014CitationJOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.24, no.8, pp.1 - 14PublisherIOP PUBLISHING LTD