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Vapor-Phase Dry Development of a Nanoscale Zn-Based Metal-Organic Extreme Ultraviolet Photoresist via Surface-Limited β-Diketone Chelation for High-Resolution PatterningGo to Link

Seok, Ji-Hoo; Kim, Jiwon; Ji, Hyeonseok; Lee, Jaehyuk; Lee, Taeho; Yoon, Kwang-Sub; Sung, Myung Mo; Ahn, Jinho

ArticleIssue Date2026CitationACS APPLIED NANO MATERIALS, v.9, no.12, pp 5506 - 5515PublisherAMER CHEMICAL SOC
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