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A dry development process for vertically tailored hybrid multilayer EUV photoresist: Chemical Vapor Development (CVD)Go to Link

Seok, Ji-Hoo; Kim, Jiwon; Ji, Hyeonseok; Lee, Jaehyuk; Yoon, Kwangsub; Sung, Myung Mo; Ahn, Jinho

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13215, pp 1 - 5PublisherSPIE
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