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Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet PelliclesGo to Linkopen access

위성주; 김원진; 김하늘; 정동민; 이동기; Choi, Jaehyuck; Cho, Sang Jin; Yu, Lan; Ahn, Jinho

ArticleIssue Date2023CitationMembranes, v.13, no.8, pp 1 - 10PublisherMDPI
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