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SCIESCOPUS
Control of the spatial distribution of ion flux in dual inductively coupled plasmasGo to Link

Cho, Sung-Won; Moon, Jun-Hyeon; Zhang, Aixian; Chung, Chin-Wook

ArticleIssue Date2021CitationJournal of Applied Physics, v.129, no.10, pp 1 - 8PublisherAmerican Institute of Physics
SCIESCOPUS
Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmasGo to Link

Zhang, Aixian; Kim, Min-Seok; Hong, Young-Hun; Moon, Jun-Hyeon; Kim, Kyung-Hyun; Chung, Chin Wook

ArticleIssue Date2022CitationPHYSICS OF PLASMAS, v.29, no.1, pp.1 - 10PublisherAMER INST PHYSICS
SCIESCOPUS
Effects of RF bias frequency and power on the plasma parameters and ash rate in a remote plasma sourceGo to Link

Zhang, Aixian; Lee, Moo-Young; Lee, Ho-Won; Moon, Ho-Jun; Chung, Chin-Wook

ArticleIssue Date2021CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.30, no.2, pp.1 - 9PublisherIOP PUBLISHING LTD
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