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Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing Go to Link

Kang, Geonhyeong; Shin, Hunbeom; Kim, Seungyeob; Zhang, Lingwei; Kim, Giuk; Lee, Sujeong; Nam, Yunseok; Kim, Chaeheon; Kim, Hoon; Ahn, Jinho, et al.

ArticleIssue Date2025CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.43, no.1, pp 1 - 6PublisherAmerican Institute of Physics

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Kinetically Stabilized Hafnia Ferroelectric of Al-Doped HfO2 Film by Fast Ramping and Fast Cooling Process Go to Link

Zhang, Lingwei; Kim, Giuk; Lee, Sangho; Shin, Hunbeom; Lim, Youngjin; Kim, Kang; Oh, Il-Kwon; Park, Sang-Hee Ko; Ahn, Jinho; Jeon, Sanghun

ArticleIssue Date2024CitationIEEE Transactions on Electron Devices, v.71, no.12, pp 7398 - 7404PublisherInstitute of Electrical and Electronics Engineers

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Low-Temperature (450 °C) Crystallization of Al:HfO2 Ferroelectric Thin Films Enabled by Microwave Annealing Process Go to Link

Kim, Giuk; Zhang, Lingwei; Lee, Sangho; Shin, Hunbeom; Lim, Youngjin; Kim, Kang; Oh, Il-Kwon; Park, Sang-Hee Ko; Ahn, Jinho; Jeon, Sanghun

ArticleIssue Date2025CitationIEEE Transactions on Electron Devices, v.72, no.10, pp 5538 - 5543PublisherInstitute of Electrical and Electronics Engineers

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Browsing by Zhang, LingweiAuthor

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