Ge nanocoatings as anode for three dimensional Si based Li ion microbatteries

Abstract

Three dimensional (3D) hedgehog-like Ge nanoelectrodes coated on patterned Si substrate are successfully fabricated through the facile chemical vapor deposition (CVD) process. The 3D Si substrate with enlarged surface area and the abundant Ge shell electrode configuration are together favorable to enhance the lithiation/delithiation kinetics during cycling. Impressively, the optimized 3D Si@hedgehog-like Ge (Si@H-Ge) NRs composites anodes embrace high reversible areal capacity and superior rate capability when employed as anode material for 3D Si based lithium ion microbatteries (LIMBs).