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Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitively argon discharge
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-02T10:57:42Z | - |
| dc.date.available | 2021-08-02T10:57:42Z | - |
| dc.date.issued | 2019-10-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/13127 | - |
| dc.title | Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitively argon discharge | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 72nd Annual Gaseous Electronics Conference | - |
| dc.citation.conferencePlace | Texas A&M Hotel | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)