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The p-n heterojunction properties on CoOx/IGZO film with various oxygen flow ratio by RF magnetron sputtering
- Authors
- 김은규
- Issue Date
- 19-Aug-2021
- Publisher
- 한국진공학회
- Citation
- 제 61회 한국진공학회 하계정기학술대회
- Conference Name
- 제 61회 한국진공학회 하계정기학술대회
- Place
- 소노캄 제주
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Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
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