Atomic layer etching of TiN with non-greenhouse gas
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안진호 | - |
dc.date.accessioned | 2022-02-07T05:13:39Z | - |
dc.date.available | 2022-02-07T05:13:39Z | - |
dc.date.issued | 20220118 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/134436 | - |
dc.title | Atomic layer etching of TiN with non-greenhouse gas | - |
dc.type | Conference | - |
dc.citation.conferenceName | 2022 nano convergence conference | - |
dc.citation.conferencePlace | 곤지암리조트 | - |
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