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Photoresist ashing in inductively coupled plasma with magnetic resonance wireless power transfer system
- Authors
- 김주호
- Issue Date
- 6-Oct-2021
- Publisher
- the American Physical Society
- Citation
- 74th Annual Gaseous Electronics Conference
- Conference Name
- 74th Annual Gaseous Electronics Conference
- Place
- virtual platform
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Related Researcher
- Kim, Ju Ho
- COLLEGE OF ENGINEERING (서울 전기·생체공학부)