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가스 혼합비에 따른 플라즈마 내의 아르곤 준안정 준위 원자밀도의 거동

Authors
이원욱
Issue Date
16-Feb-2022
Publisher
한국진공학회
Citation
제62회 한국진공학회 동계정기학술대회
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/137777
Conference Name
제62회 한국진공학회 동계정기학술대회
Place
강원도 횡성
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서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers

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