Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Moo-Young | - |
dc.contributor.author | Seo, Jong-In | - |
dc.contributor.author | Eo, Hyundong | - |
dc.contributor.author | Kim, Tae-Woo | - |
dc.contributor.author | Jung, Jiwon | - |
dc.contributor.author | Lim, Yeong-Min | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-06T17:42:05Z | - |
dc.date.available | 2022-07-06T17:42:05Z | - |
dc.date.created | 2021-07-14 | - |
dc.date.issued | 2021-06 | - |
dc.identifier.issn | 0963-0252 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/141842 | - |
dc.description.abstract | The floating probe method (FPM) applicable for processing plasma diagnostics was developed for the measurement of ion density and electron temperature (J. Appl. Phys. 101 033305). When an AC voltage is applied to a floating probe, harmonic currents are generated due to the nonlinearity of the sheath. The electron temperature and ion density are obtained using the harmonic currents and the voltage across the sheath. However, in the FPM, when the sensing resistance becomes similar to the sheath resistance, iterative calculations must be performed to compensate for the voltage reduction across the sheath due to the sensing resistor. In this paper, the voltage across a DC blocking capacitor is measured to directly obtain the voltage across the sheath. Therefore, it is not necessary to compensate for the voltage reduction across the sheath through iterative calculations. The electron temperature was increasingly overestimated as the capacity of the DC blocking capacitor became smaller. This overestimation was caused by the capacitive load effect and was compensated for using a correction for the second harmonic current. The measured electron temperature and ion density were compared with those from electron energy distribution functions (EEDFs) in an inductively coupled plasma, and they were in good agreement. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1088/1361-6595/abff0f | - |
dc.identifier.scopusid | 2-s2.0-85108844466 | - |
dc.identifier.wosid | 000659666600001 | - |
dc.identifier.bibliographicCitation | PLASMA SOURCES SCIENCE & TECHNOLOGY, v.30, no.6, pp.1 - 8 | - |
dc.relation.isPartOf | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.citation.title | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.citation.volume | 30 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 8 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | Distribution functions | - |
dc.subject.keywordPlus | Electron energy levels | - |
dc.subject.keywordPlus | Electrons | - |
dc.subject.keywordPlus | Harmonic analysis | - |
dc.subject.keywordPlus | Inductively coupled plasma | - |
dc.subject.keywordPlus | Ions | - |
dc.subject.keywordPlus | Iterative methods | - |
dc.subject.keywordPlus | Plasma diagnostics | - |
dc.subject.keywordPlus | Probes | - |
dc.subject.keywordPlus | Temperature measurement | - |
dc.subject.keywordPlus | Blocking capacitor | - |
dc.subject.keywordPlus | Capacitive loads | - |
dc.subject.keywordPlus | Electron energy distribution functions | - |
dc.subject.keywordPlus | Harmonic currents | - |
dc.subject.keywordPlus | Iterative calculation | - |
dc.subject.keywordPlus | Sensing resistances | - |
dc.subject.keywordPlus | Sheath resistance | - |
dc.subject.keywordPlus | Voltage reduction | - |
dc.subject.keywordPlus | Electron temperature | - |
dc.subject.keywordAuthor | plasma diagnostics | - |
dc.subject.keywordAuthor | electron temperature | - |
dc.subject.keywordAuthor | floating probe method | - |
dc.subject.keywordAuthor | DC blocking capacitor | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1088/1361-6595/abff0f | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.