Optical characteristic analysis of the boronization process by using carborane

Abstract

Boronization with carborane (C2B10H12) was archieved in a vacuum vessel coupled to a filament discharge system. Optical emission spectroscopy was employed to characterize the boronization process. The Balmer lines of hydrogen and deuterium were measured, and the boronization process was analyzed by using the intensity ratio of the H (alpha) to the D (alpha) line (I-H/I-D). The relation between the pressure and the intensity ratio was investigated, and the thickness of the deposited boron film was predicted. Also, the dilution ratio H/(H + D) of the boron film was analyzed and compared with the one predicted from an optical analysis of the emission spectrum.