Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas
DC Field | Value | Language |
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dc.contributor.author | Kim, Young-Cheol | - |
dc.contributor.author | Lee, Hyo-Chang | - |
dc.contributor.author | Kim, Yu-Sin | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-07T05:37:09Z | - |
dc.date.available | 2022-07-07T05:37:09Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2015-08 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/143409 | - |
dc.description.abstract | Vibrational temperature (T-vib) of N-2 gas and electron energy distribution function (EEDF) were measured in Ar/N-2 mixture inductively coupled plasma (ICP). At a low gas pressure of 5 mTorr where the EEDF is bi-Maxwellian distribution, plasma density n(p) and T-vib (from 7000K to 5600 K) slightly decrease. However, remarkable decrease in n(p) and T-vib is found with the dilution of N-2 gas at a high gas pressure of 50 mTorr, where the EEDF is depleted Maxwellian distribution at a fixed ICP power of 150 W. When the ICP power increases from 150 W to 300 W at the gas pressure of 50 mTorr, the depleted tail on the EEDF is replenished, while n(p) is little changed with the dilution of N-2 gas. In this case, T-vib slightly decreases from 9500 K to 7600 K. These results indicate that the variation of T-vib is strongly correlated to the plasma parameters, such as the plasma density and EEDF. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1063/1.4928907 | - |
dc.identifier.scopusid | 2-s2.0-84940495379 | - |
dc.identifier.wosid | 000360647600096 | - |
dc.identifier.bibliographicCitation | PHYSICS OF PLASMAS, v.22, no.8, pp.1 - 7 | - |
dc.relation.isPartOf | PHYSICS OF PLASMAS | - |
dc.citation.title | PHYSICS OF PLASMAS | - |
dc.citation.volume | 22 | - |
dc.citation.number | 8 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 7 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | ENERGY DISTRIBUTION FUNCTION | - |
dc.subject.keywordPlus | GAS TEMPERATURE | - |
dc.subject.keywordPlus | DISCHARGE | - |
dc.subject.keywordPlus | ARGON | - |
dc.subject.keywordPlus | O-2 | - |
dc.subject.keywordPlus | CH | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.4928907 | - |
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