A study on the E-H mode transition with the line integrated He 23S metastable atom density in an inductively coupled plasma
- Authors
- Shim, Sungyong; Lee, Wonwook; Park, Jin Woo; Oh, Cha-Hwan
- Issue Date
- 2021
- Publisher
- Elsevier B.V.
- Keywords
- 23SMetastable atom density; E-H mode Transition; He inductively coupled plasma
- Citation
- Current Applied Physics, v.28, pp.7 - 12
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- Current Applied Physics
- Volume
- 28
- Start Page
- 7
- End Page
- 12
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/144071
- DOI
- 10.1016/j.cap.2021.04.015
- ISSN
- 1567-1739
- Abstract
- Helium (He) inductively coupled plasma (ICP) was generated by a right-helical-type RF antenna. At a fixed He pressure of 20 mTorr, the optical emission spectrum from the He plasma was measured with RF power. The E-H mode transition and the characteristic hysteresis of the mode transition were confirmed by a change in the spectral line intensity of the 33D−23P transition at 587.6 nm. By laser absorption spectroscopy using a laser light with a wavelength of 1083 nm resonant to the 23S→23P absorption transition, the line-integrated He 23S metastable density was measured and found to show consistent behavior with the spectral line intensity of the 33D−23P transition during the E-H mode transition. The line-integrated He 23S metastable atom density exhibited distinctly different longitudinal distributions in the E and H modes. © 2021 Korean Physical Society
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