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Study on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas

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dc.contributor.authorKim, Young-Cheol-
dc.contributor.authorLee, Hyo-Chang-
dc.contributor.authorChung, Chin-Wook-
dc.date.accessioned2022-07-07T13:28:56Z-
dc.date.available2022-07-07T13:28:56Z-
dc.date.created2021-05-12-
dc.date.issued2014-10-
dc.identifier.issn0093-3813-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/144498-
dc.description.abstractIn this paper, 2-D plasma density profile is measured in an inductively coupled plasma (ICP) with changing rf power and gas pressure. As the ICP power increases at a fixed argon gas pressure of 100 mtorr, increase in the plasma density is observed at the radial edge. It could be understood by the neutral gas depletion in the discharge center and the step-ionization effect.-
dc.language영어-
dc.language.isoen-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.titleStudy on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas-
dc.typeArticle-
dc.contributor.affiliatedAuthorChung, Chin-Wook-
dc.identifier.doi10.1109/TPS.2014.2331362-
dc.identifier.scopusid2-s2.0-85028105573-
dc.identifier.wosid000344548300267-
dc.identifier.bibliographicCitationIEEE TRANSACTIONS ON PLASMA SCIENCE, v.42, no.10, pp.2858 - 2859-
dc.relation.isPartOfIEEE TRANSACTIONS ON PLASMA SCIENCE-
dc.citation.titleIEEE TRANSACTIONS ON PLASMA SCIENCE-
dc.citation.volume42-
dc.citation.number10-
dc.citation.startPage2858-
dc.citation.endPage2859-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryPhysics, Fluids & Plasmas-
dc.subject.keywordPlusArgon-
dc.subject.keywordPlusElectric discharges-
dc.subject.keywordPlusIonization of gases-
dc.subject.keywordPlusPlasma density-
dc.subject.keywordPlusInductively coupled plasma-
dc.subject.keywordPlus2-D measurements-
dc.subject.keywordPlusArgon gas pressure-
dc.subject.keywordPlusDensity profile-
dc.subject.keywordPlusICP-
dc.subject.keywordPlusInductively coupled plasma (ICP)-
dc.subject.keywordPlusIonization effect-
dc.subject.keywordPlusNeutral gas-
dc.subject.keywordPlusPlasma uniformity-
dc.subject.keywordAuthorICP-
dc.subject.keywordAuthorneutral gas depletion-
dc.subject.keywordAuthorplasma uniformity-
dc.identifier.urlhttps://ieeexplore.ieee.org/document/6884864-
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