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Effect of NH3 Flow on Electrical and Mechanical Properties of ALD TiN Thin Films
- Authors
- 안지훈
- Issue Date
- 20210628
- Conference Name
- AVS ALD2021
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Collections - 서울 공과대학 > 서울 공학교육혁신센터 > 1. Journal Articles
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Related Researcher
- Ahn, Ji Hoon
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)