A monitoring device made of an anodic aluminum oxide template for plasma-induced charging potential measurements in the high-aspect-ratio trench structure

Abstract

A monitoring device is proposed to investigate the charge accumulation effects in a high-aspect-ratio trench structure. This monitoring device is made of an anodic aluminum oxide (AAO) template, which is a self-organized material with parallel pores, to demonstrate a high aspect ratio trench structure. A top electrode and bottom electrode were formed in the AAO contact structure for measuring electric potentials. These electrodes can be assumed to be electrically floating due to the very high input resistance of the measurement circuit. Therefore, the electric potentials resulting from the charge accumulation can be measured. In this paper, the fabrication process of the proposed device and experimental demonstrations are presented.