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Ultra Gas-Proof Polymer Hybrid Thin Layer

Authors
Lee, LynnYoon, Kwan HyuckJung, Jin WonYoon, Hong RhoKim, HongbumKim, Seung HunSong, Seung YongPark, Kyung SunSung, Myung Mo
Issue Date
Sep-2018
Publisher
AMER CHEMICAL SOC
Keywords
hermetic sealing organic-inorganic hybrid thin layer; atomic layer infiltration; flexible OLED; encapsulation film
Citation
NANO LETTERS, v.18, no.9, pp.5461 - 5466
Indexed
SCIE
SCOPUS
Journal Title
NANO LETTERS
Volume
18
Number
9
Start Page
5461
End Page
5466
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/149390
DOI
10.1021/acs.nanolett.8b01855
ISSN
1530-6984
Abstract
Hermetic sealing is an important technology for isolating and protecting air-sensitive materials and is key in the development of foldable and stretchable electronic devices. Here we report an ultra gas-proof polymer hybrid thin layer prepared by filling the free volume of the polymer with A1203 using gas-phase atomic layer infiltration. The high density polymer-inorganic hybrid shows extremely low gas transmission rate, below the detection limit of the Ca corrosion test (water vapor transmission rate <10(-7) g m(-2) day(-1)). Furthermore, because of the remarkable nanometer-scale thinness of the complete polymer-inorganic hybrid, it is highly flexible, which makes it useful for hermetic sealing of stretchable and foldable devices.
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