Ultra Gas-Proof Polymer Hybrid Thin Layer
- Authors
- Lee, Lynn; Yoon, Kwan Hyuck; Jung, Jin Won; Yoon, Hong Rho; Kim, Hongbum; Kim, Seung Hun; Song, Seung Yong; Park, Kyung Sun; Sung, Myung Mo
- Issue Date
- Sep-2018
- Publisher
- AMER CHEMICAL SOC
- Keywords
- hermetic sealing organic-inorganic hybrid thin layer; atomic layer infiltration; flexible OLED; encapsulation film
- Citation
- NANO LETTERS, v.18, no.9, pp.5461 - 5466
- Indexed
- SCIE
SCOPUS
- Journal Title
- NANO LETTERS
- Volume
- 18
- Number
- 9
- Start Page
- 5461
- End Page
- 5466
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/149390
- DOI
- 10.1021/acs.nanolett.8b01855
- ISSN
- 1530-6984
- Abstract
- Hermetic sealing is an important technology for isolating and protecting air-sensitive materials and is key in the development of foldable and stretchable electronic devices. Here we report an ultra gas-proof polymer hybrid thin layer prepared by filling the free volume of the polymer with A1203 using gas-phase atomic layer infiltration. The high density polymer-inorganic hybrid shows extremely low gas transmission rate, below the detection limit of the Ca corrosion test (water vapor transmission rate <10(-7) g m(-2) day(-1)). Furthermore, because of the remarkable nanometer-scale thinness of the complete polymer-inorganic hybrid, it is highly flexible, which makes it useful for hermetic sealing of stretchable and foldable devices.
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