Transient voltage analysis on a series capacitor of the floating probe for plasma diagnostics
- Authors
- Lee, Moo-Young; Kim, Kyung-Hyun; Chung, Chin-Wook
- Issue Date
- Jul-2018
- Publisher
- IOP PUBLISHING LTD
- Keywords
- plasma diagnostics; plasma parameter; square voltage
- Citation
- PLASMA SOURCES SCIENCE & TECHNOLOGY, v.27, no.7
- Indexed
- SCIE
SCOPUS
- Journal Title
- PLASMA SOURCES SCIENCE & TECHNOLOGY
- Volume
- 27
- Number
- 7
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/149722
- DOI
- 10.1088/1361-6595/aacf32
- ISSN
- 0963-0252
- Abstract
- An electrical plasma diagnostic method is proposed to determine plasma density and electron temperature. When two square voltages with different amplitudes are applied to a probe tip, a capacitor connected to the probe is charged due to the current flowing from the plasma. To obtain the plasma parameters, a circuit model with a nonlinear sheath and capacitor is proposed. The electron temperature and plasma density given by the model can be obtained from the ratio of the capacitor voltages. The results are in agreement with those obtained from electron energy probability functions in argon inductively coupled plasma discharge.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/149722)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.