Compensation of the sheath effects in cylindrical floating probes
- Authors
- Park, Ji-Hwan; Chung, Chin-Wook
- Issue Date
- May-2018
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v.25, no.5
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICS OF PLASMAS
- Volume
- 25
- Number
- 5
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/150101
- DOI
- 10.1063/1.5010910
- ISSN
- 1070-664X
- Abstract
- In cylindrical floating probe measurements, the plasma density and electron temperature are overestimated due to sheath expansion and oscillation. To reduce these sheath effects, a compensation method based on well-developed floating sheath theories is proposed and applied to the floating harmonic method. The iterative calculation of the Allen-Boyd-Reynolds equation can derive the floating sheath thickness, which can be used to calculate the effective ion collection area; in this way, an accurate ion density is obtained. The Child-Langmuir law is used to calculate the ion harmonic currents caused by sheath oscillation of the alternating-voltage-biased probe tip. Accurate plasma parameters can be obtained by subtracting these ion harmonic currents from the total measured harmonic currents. Herein, the measurement principles and compensation method are discussed in detail and an experimental demonstration is presented. Published by AIP Publishing.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/150101)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.