Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Il-seo | - |
dc.contributor.author | Kim, Dong-Hwan | - |
dc.contributor.author | Kim, Kyung-Hyun | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-14T04:08:52Z | - |
dc.date.available | 2022-07-14T04:08:52Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2017-05 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/152439 | - |
dc.description.abstract | The two-dimensional temporal behavior of plasma was investigated at the wafer-level when applied power was turned on/off, which is one cycle of the pulsed plasma. For the measurement of transient plasma, the floating harmonic method and a post-processing method were used to obtain the ion flux and the electron temperature with a 1 ms time resolution. The results show that the transient behaviors of plasma such as antenna power absorption are observed in pulsed inductively coupled plasma. Antenna-shaped ion flux is observed when the power is turned on, and the radial profiles of the ion flux are followed by a diffusion solution when the power is turned off. Furthermore, the electron temperature shows pulsed plasma characteristics. Published by AIP Publishing. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1063/1.4982815 | - |
dc.identifier.scopusid | 2-s2.0-85018787499 | - |
dc.identifier.wosid | 000400817900077 | - |
dc.identifier.bibliographicCitation | PHYSICS OF PLASMAS, v.24, no.5 | - |
dc.relation.isPartOf | PHYSICS OF PLASMAS | - |
dc.citation.title | PHYSICS OF PLASMAS | - |
dc.citation.volume | 24 | - |
dc.citation.number | 5 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | HIGH-DENSITY | - |
dc.subject.keywordPlus | BOMBARDMENT | - |
dc.subject.keywordPlus | ARGON | - |
dc.subject.keywordPlus | PROBE | - |
dc.identifier.url | https://pubs.aip.org/aip/pop/article/24/5/053510/991046/Temporal-evolution-of-two-dimensional-electron | - |
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