Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Ikjin | - |
dc.contributor.author | Kim, Aram | - |
dc.contributor.author | Lee, Hyo-Chang | - |
dc.contributor.author | Kim, Dong-Hwan | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-14T20:40:37Z | - |
dc.date.available | 2022-07-14T20:40:37Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2017-01 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/153080 | - |
dc.description.abstract | A floating type Langmuir probe was studied to measure the electron energy distribution function (EEDF) in plasmas. This method measures the current (I)-voltage (V) curve with rising and falling variations based on a floating potential by using charge-discharge characteristics of the series capacitor when a square-pulse voltage is applied. In addition, this method measures the EEDF by using the alternating current (ac) superposition method. The measured EEDFs were in good agreement with results from a conventional single Langmuir probe. This technique could be applied as a plasma diagnostic method in the capacitively coupled plasma where the plasma potential is extremely high or the processing plasma where the deposition gas is used. Published by AIP Publishing. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1063/1.4972576 | - |
dc.identifier.scopusid | 2-s2.0-85009223920 | - |
dc.identifier.wosid | 000395395100080 | - |
dc.identifier.bibliographicCitation | PHYSICS OF PLASMAS, v.24, no.1 | - |
dc.relation.isPartOf | PHYSICS OF PLASMAS | - |
dc.citation.title | PHYSICS OF PLASMAS | - |
dc.citation.volume | 24 | - |
dc.citation.number | 1 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | DISCHARGE | - |
dc.identifier.url | https://pubs.aip.org/aip/pop/article/24/1/013508/168148/Pulsed-floating-type-Langmuir-probe-for | - |
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