Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Gu, Seuli | - |
dc.contributor.author | Kang, Hyun-Ju | - |
dc.contributor.author | Kwon, Deuk-Chul | - |
dc.contributor.author | Kim, Yu-Sin | - |
dc.contributor.author | Chang, Yoon-Min | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-15T16:10:11Z | - |
dc.date.available | 2022-07-15T16:10:11Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2016-06 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/154509 | - |
dc.description.abstract | The electron bounce resonance was experimentally investigated in a low pressure planar inductively coupled plasma. The electron energy probability functions (EEPFs) were measured at different chamber heights and the energy diffusion coefficients were calculated by the kinetic model. It is found that the EEPFs begin to flatten at the first electron bounce resonance condition, and the plateau shifts to a higher electron energy as the chamber height increases. The plateau which indicates strong electron heating corresponds not only to the electron bounce resonance condition but also to the peaks of the first component of the energy diffusion coefficients. As a result, the plateau formation in the EEPFs is mainly due to the electron bounce resonance in a finite inductive discharge. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1063/1.4952634 | - |
dc.identifier.scopusid | 2-s2.0-84973897695 | - |
dc.identifier.wosid | 000379172200110 | - |
dc.identifier.bibliographicCitation | PHYSICS OF PLASMAS, v.23, no.6, pp.1 - 5 | - |
dc.relation.isPartOf | PHYSICS OF PLASMAS | - |
dc.citation.title | PHYSICS OF PLASMAS | - |
dc.citation.volume | 23 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 5 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | KINETICS | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.4952634 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.